DCA Instruments UHV Cluster Tool / MBE Growth, Linear Sputtering, Pre-Clean

This item is being sold on behalf of one of our clients and is not held in our own stock. Please enquire with us if you would like to buy this item as shipping, warranty and the terms and conditions of sale will be dependent on the client's needs. The system is a complete UHV cluster tool configured for automated wafer transfer between multiple deposition, cleaning, storage and loading chambers, designed for wafer sizes up to 6” / 150 mm diameter. It includes two MBE growth chambers, one linear sputtering chamber, one pre-cleaning chamber, one central distribution chamber, one storage chamber and one cassette load lock. The system can be offered as a complete package or split into individual sections, subject to agreement.